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Effects of the process conditions on the plume of a laser-irradiated indium-tin-oxide target

  • Autori: CALI', C; MACALUSO, R; MOSCA, M
  • Anno di pubblicazione: 2001
  • Tipologia: Articolo in rivista (Articolo in rivista)
  • OA Link:


The plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.