Laser Beam Lithography For 3-D Surface Patterning
- Autori: Arnone, C.; Giaconia, G. C.; Pace, C.; Bonura, S.; Greco, M.
- Anno di pubblicazione: 1993
- Tipologia: Capitolo o Saggio
- OA Link: http://hdl.handle.net/10447/425923
Abstract
A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.