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MARCO BARBERA

Comparison of different Zr deposition techniques on CNT thin films

  • Autori: Fiorentino, F.; Todaro, M.; Lo Cicero, U.; Sciortino, L.; Alaimo, E.; D'Anca, F.; Di Cicca, G.; Varisco, S.; Gulizzi, A.; Saitta, C.; Törmä, P.T.; Haq, B.; Lipsanen, H.; Barbera, M.
  • Anno di pubblicazione: 2026
  • Tipologia: Articolo in rivista
  • OA Link: http://hdl.handle.net/10447/714125

Abstract

In recent years, CNT pellicles have been investigated as suitable materials for filters for high-energy astrophysics missions, and more recently specifically for EUV missions,where Zr is a relevant material due to its transmittance in this band. In this work, we present the comparison of two different types of zirconium depositions on CNT pellicles, and manage to obtain a complete filter with performances compatible with the typical requirements for EUV missions.