Multitechnique characterization of bare and metal-coated carbon nanotube ultrathin pellicles
- Authors: Fiorentino, F.; Alaimo, E.; Sciortino, L.; Todaro, M.; Lo Cicero, U.; D'Anca, F.; Montinaro, N.; Varisco, S.; Candia, R.; Di Cicca, G.; Törmä, P.T.; Kostamo, J.; Varjos, I.; Moisanen, M.; Mikladal, B.; Barbera, M.
- Publication year: 2025
- Type: Contributo in atti di convegno pubblicato in volume
- OA Link: http://hdl.handle.net/10447/689559
Abstract
In recent years, carbon nanotube (CNT) pellicles have gained prominence due to their optical and mechanical properties, proving an interesting material for EUV nanolithograpliy. In this work, we propose a comparison of CNT pellicles with varying densities and coating thicknesses to assess their potential applicability in future space missions, employing different experimental techniques such as transmission spectroscopy, Scanning Electron Microscopy and static pressure load tests.