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BRUNO GIUSEPPE PIGNATARO

Tantalum nitride thin film resistors by low temperature reactive sputtering for plastic electronics

  • Authors: Scandurra, A; Indelli GF; Pignataro,B; Di Marco S; Di Stefano,MA; Ravesi,S; Pignataro, S
  • Publication year: 2008
  • Type: Articolo in rivista (Articolo in rivista)
  • Key words: plastic electronics, tantalum nitride, XPS, AFM,SIMS
  • OA Link: http://hdl.handle.net/10447/37900