Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication
- Authors: Lo Cicero, U; Arnone, C; Barbera, M; Collura, A; Lullo, G; Perinati, E; Varisco, S
- Publication year: 2009
- Type: eedings
- OA Link: http://hdl.handle.net/10447/49096
Abstract
We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.