Technologies for the fabrication of cylindrical fine line devices

Authors: Lullo G.; Arnone C.; Giaconia G.C.
Publication year: 1997
Type: Articolo in rivista
OA Link: http://hdl.handle.net/10447/427584

Abstract

A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.