RCE photodetectors based on VCSEL structures
- Authors: Knodl, T.; Choy, H.K.H.; Pan, J.L.; King, R.; Jager, R.; Lullo, G.; Ahadian, J.F.; Ram, R.J.; Fonstad, C.G.; Ebeling, K.J.
- Publication year: 1999
- Type: Articolo in rivista
- OA Link: http://hdl.handle.net/10447/675730
Abstract
We have fabricated top illuminated resonant cavity enhanced (RCE) detectors by partially removing top-mirror pairs of a vertical-cavity surface-emitting laser (VCSEL) structure by etching. The observed maximum quantum efficiency is 73% with a spectral full-width at half-maximum (FWHM) of about 1.7 nm. This particular RCE detector was fabricated by etching away 8 top-mirror pairs of a VCSEL structure, with 15.5 top-mirror pairs remaining. Spectral FWHM's as wide as 6.5 nm, with a peak efficiency of 36%, have been measured in the case of 4.5 top mirrors remaining. An increase in the 3-dB detector bandwidth up to 2.8 GHz is observed by reducing the active device diameter from 90 to 20 μm.