Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries
- Authors: Arnone C.; Giaconia C.; Pace C.; Greco M.
- Publication year: 1994
- Type: Articolo in rivista
- OA Link: http://hdl.handle.net/10447/425917
Abstract
A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited