Multi-bit storage through Si nanocrystals embedded in SiO2
- Authors: Lombardo, S.; Corso, D.; Crupi, I.; Gerardi, C.; Ammendola, G.; Melanotte, M.; De Salvo, B.; Perniola, L.
- Publication year: 2004
- Type: Articolo in rivista (Articolo in rivista)
- OA Link: http://hdl.handle.net/10447/179562
Abstract
We have realized Si nanocrystal memory cells in which the Si dots have been deposited by CVD on SiO2 and then covered by a CVD control oxide. In this paper, we report a study on the potential of these cells for dual bit storage. © 2004 Elsevier B.V. All rights reserved.