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The influence of composition on the solid state properties of anodic films on Al-Ta alloys

  • Authors: Di Franco, F.; Zaffora, A.; Santamaria, M.; Di Quarto, F.; Tsuji, E.; Habazaki, H.
  • Publication year: 2015
  • Type: Abstract in atti di convegno pubblicato in volume
  • Key words: solid state properties, anodic films, Al-Ta alloys
  • OA Link:


Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.