The influence of composition on the solid state properties of anodic films on Al-Ta alloys
- Authors: Di Franco, F.; Zaffora, A.; Santamaria, M.; Di Quarto, F.; Tsuji, E.; Habazaki, H.
- Publication year: 2015
- Type: Abstract in atti di convegno pubblicato in volume
- Key words: solid state properties, anodic films, Al-Ta alloys
- OA Link: http://hdl.handle.net/10447/189667
Abstract
Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.