Modeling and simulation of a VCM micromotor and its potential applications

Abstract

This paper presents the modeling and simulation of a VCM electrostatic micromotor with a new FEM analysis and implementation method, in order to determine the electrical parameters of the model and the generated electrostatic torque. Both the modeling and the simulation have been achieved using several software programs. In particular, the geometric model created with AUTOCAD has been imported to the FEMM program for the finite-element-method analysis. Then, with the LUA and MATLAB simulation programs, the parameters of the model and the related electrostatic torque have been calculated. The results obtained from this work have been compared with those reported in other scientific papers, showing accordance in terms of results. Thus, the model of the VCM micromotor has been successfully validated. This type of microactuators could become very promising for several applications in medicine.