Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection
- Autori: Tomasino, Alessandro; Piccoli, Riccardo; Jestin, Yoann; Busacca, Alessandro; Delprat, Sebastien; Chaker, Mohamed; Peccianti, Marco; Clerici, Matteo; Razzari, Luca; Morandotti, Roberto
- Anno di pubblicazione: 2018
- Tipologia: Contributo in atti di convegno pubblicato in volume
- OA Link: http://hdl.handle.net/10447/351770
Abstract
We report on the characterization of a new type of CMOS-compatible device for terahertz solid-state biased coherent detection, which relies on a 1-µm-wide metallic slit embedded in a thin film of PECVD-grown silicon nitride.